Nanopositioners, Piezo Stage Positioners,
Flexure Positioners, Piezo Scanners

What is a Piezo Stage and What is it used for?

A piezo stage, short for piezoelectric stage, is a highly precise positioning mechanism that utilizes the piezoelectric effect for highly accurate movement with resolution down to the nanometer reange and below. and controlled movement. The piezoelectric effect involves the generation of electric charge in response to mechanical stress and vice versa. There are several different types of piezo stages, optimized for longer travel or higher precision or force. In a piezo stage, one or more piezoelectric elements are usually integrated into the mechanical structure of the stage.

When an electric voltage is applied to the piezoelectric elements, they undergo minute deformations or expansions, resulting in incremental movements with very high precision. Piezo stages are known for their high resolution, rapid response, and exceptional precision, making them suitable for applications in fields such as microscopy, semiconductor manufacturing, optics, and other areas where precisely controlled motion is crucial. Due to the nanometer precise positioning capability, these stages are also sometimes called NanoPositioners Piezoelectric stages stages are sometimes used in conjunction with other motion control components and systems, such as linear motors (hybrid systems) to provide the best of both worlds - achieving intricate and fine adjustments in various industrial and scientific processes.

Piezo stages provide advantages when it comes to very smooth motion with nanometer and subnanometer resolution. Piezoelectric nanopositiong stages are also superior to other motor technologies in terms of step & settle performance, and fast scanning. Millisecond and even microsecond range response is feasible with a well-designed piezo flexure stage. Piezo motion stages work well in vacuum and can be manufactured with non-magnetic materials due to the non-magnetic nature of the ceramic motor material. PI is a world leader in piezo stage design with 5 decades of experience. PI's piezoelectric transducers have been life-tested for 100 Billion cycles by JPL/NASA for the Mars Mission.

In addition to classical piezo flexure stages, PI also offers several types of piezo motors and piezo motor positioners with long travel ranges to 100mm and more. Read this article on a variety of different piezo motor principles to learn more how to select the right piezo motor or stage depending on the main focus, such as speed, force, resolution and cost.

See examples below, and click on the image for further details. PI's piezoceramic design and manufacturing division PI Ceramic specializes in piezoelectric transducers and ultrasound transducers.


Piezo Stage Examples

microscope stage
Microscope Stages / Z-Motors
 Multiaxis Piezo Stages
Multiaxis Piezo Stages
Piezo Vertical Stages
Z-Piezo Stages / Actuators
Miniature nanopositioning stages, XYZ
Compact X / XY / XYZ Systems
Single Axis Nanopositioning Stages
Single Axis Piezo Stages
Nanopositioning Stages w/Aperture
Piezo Stage with Aperture
3,4,5,6-axis piezo stages
6-Axis Piezo Stages
Mini Piezo Motor Stages
Mini Piezo Motor Stages
Piezo Motor Linear Piezo Stages
Piezo Motor Linear Piezo Stages
 Voice Coil Scanners
Scanning Stages w/ Voice Coil Drive
High Force Piezo Motor Actuators
NEXLINE® / NEXACT® High Force Piezo Motor Actuators
Hybrid Piezo Actuators, Astromomy
Hybrid Piezo Actuators, Astromomy
XY-Piezomotor Stages
Open-Frame XY Piezo-Motor Stage

Piezo Mirror Platforms
Piezo Stacks
Piezo Stacks

OEM Piezo Controllers
Single Channel Piezo Drivers
1-Channel Piezo Controllers
 Digital Piezo Controllers
Digital Piezo Controllers
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